JPH0317634U - - Google Patents
Info
- Publication number
- JPH0317634U JPH0317634U JP7851989U JP7851989U JPH0317634U JP H0317634 U JPH0317634 U JP H0317634U JP 7851989 U JP7851989 U JP 7851989U JP 7851989 U JP7851989 U JP 7851989U JP H0317634 U JPH0317634 U JP H0317634U
- Authority
- JP
- Japan
- Prior art keywords
- side plates
- wafer carrier
- wafer
- plates
- support plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000000969 carrier Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7851989U JPH0317634U (en]) | 1989-07-03 | 1989-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7851989U JPH0317634U (en]) | 1989-07-03 | 1989-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317634U true JPH0317634U (en]) | 1991-02-21 |
Family
ID=31621865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7851989U Pending JPH0317634U (en]) | 1989-07-03 | 1989-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317634U (en]) |
-
1989
- 1989-07-03 JP JP7851989U patent/JPH0317634U/ja active Pending